ASTRO PACTO-16Q

Quartz barrel microwave plasma ashing machine is suitable for batch wafer PR removal and descum applications, including wafer sizes up to 8"

Applications

-Batch wafer surface activation

-Batch wafer photoresist removal

-Removal of MEMS sacrificial layers

-DESCUM process

Product features

-Quartz material chamber

-Drawer door with view window with quartz boat support rod (optional quartz boat)

-Standard 2 gas channels with MFC (optional up to 4 channels)

-Supports batch processing of up to 8 "wafers

-2.45Ghz microwave source, power 50-1200W adjustable

-Standard dry pump (optional oil pump)

18888888