ASTRO PACTO-10H/20H

This is a highly integrated desktop microwave plasma asher, and equipped with temperature control hot plate, suitable for applications with temperature control requirements, high uniformity and high degumming speed. Suitable for all production and research applications.

Applications

-Photoresist removal

-Removal of epoxy resin glues such as PI glue or SU-8 glue

-MEMS sacrifice layer removal/release

-Bottom film to remove scum (DESCUM)

-Wafer surface

Product features

-Suitable for size materials up to 300mm and up to 300mm

-All-aluminium metal cavity

-Drawer-type cavity doors with microwave shielded viewing windows

-Temperature-controlled heating disc for heating and temperature control within 200°C (250°C optional)

-Built-in water cooling system in the chamber (external cooling water is required)

- Use a 2.45Ghz microwave plasma source

-The power is continuously adjustable within 1200W

-The Company comes standard with 2-way process gas with digital flow controller

-10.4 inch touch screen control, graphical process menu editing

- OS system, export files compatible with common office formats

-Highly integrated, with an installation size of less than 1 m²

- Good value for money

18888888