This is a highly integrated desktop microwave plasma cleaner, suitable for all small batch production and research applications. It can also be used for wafer surface activation.
-Chip package cleaning
-Wafer cleanning
-Wafer level packaging solutions
-PDMS binding of microfluidic chip
-Surface activation / hydrophilic treatment
-Oxide / organic removal
-Suitable for 300mm and below size materials
-All aluminum metal chamber
-Drawer type door with microwave shielded observation window
-2.45GHz microwave plasma source
-Continuous adjustable power within 1200W
-Standard 2-way process gas with digital flow controller
-10.4 inch touch screen control, graphical process menu editing
-OS system, export file compatible with common office format
-Highly integrated, installation size less than 1 square meter
-Cost-effective
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