ASTRO PLASMA

Advantages of microwave plasma systems

The main production of microwave plasma cleaning machine, microwave plasma degumming machine

  • No damage

    It mainly relies on the chemical action of plasma on the surface of the material without physical bombardment damage

  • High efficiency

    The higher isotropic density of electrons in plasma supports all-round cleaning

  • No electrodes

    The electrodeless in the vacuum chamber rejects cross-contamination of the cavity product and is maintenance-free

  • No UV

    There is no UV in the plasma glow of common industrial gases

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ASTRO PLASMA

Advantages of microwave plasma systems

The main production of microwave plasma cleaning machine, microwave plasma degumming machine

  • Removal of photoresist
  • Slag removal/base film
  • SU-8/PI removal
  • Sacrifice layer release
  • Plasma cleaning and activation before WB bonding/plastic sealing
  • Surface treatment of various materials
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