No damage
It mainly relies on the chemical action of plasma on the surface of the material without physical bombardment damage
The main production of microwave plasma cleaning machine, microwave plasma degumming machine
It mainly relies on the chemical action of plasma on the surface of the material without physical bombardment damage
The higher isotropic density of electrons in plasma supports all-round cleaning
The electrodeless in the vacuum chamber rejects cross-contamination of the cavity product and is maintenance-free
There is no UV in the plasma glow of common industrial gases
The main production of microwave plasma cleaning machine, microwave plasma degumming machine
Removal of photoresist
Slag removal/base film
SU-8/PI removal
Sacrifice layer release
Plasma cleaning and activation before WB bonding/plastic sealing
Surface treatment of various materials